Lithography in microelectronics: Edited by: T.M. Makhviladze Publishers: Nova Science Publishers, Inc., 283, Commack Road, Suite 300, COMMACK, New York 11725-3401, United States of America. Price: $ 62.00 (U.S. and Canada) $ 75.00 (Other countries) includes air delivery (ISBN 0-941743-30-6). Published 1989

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