![](/img/cover-not-exists.png)
VLSI electronics microstructure science volume 21 beam processing technologies: Edited by: Norman G. Einspruch S. S. Cohen Raj N. Singh Publishers: Academic Press, Inc., 1250 Sixth Avenue, San Diego, California 92101, United States of America. Price: $ 110. 00. Publication date: 1989 (ISBN 0-12- 234121-X)
G.W.A.D.Volume:
30
Year:
1990
Language:
english
DOI:
10.1016/0026-2714(90)90420-r
File:
PDF, 106 KB
english, 1990