Si/Ti/TiB2/Al structures investigated as contacts in microelectronic devices : T. Larsson, U. Wennstrom, H. Norstrom, H.-O. Blom, S. Berg and I. Engstrom. Solid-St. Electron. 32(5), 385 (1989)
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Volume:
30
Year:
1990
Language:
english
DOI:
10.1016/0026-2714(90)90498-c
File:
PDF, 127 KB
Your tags:
english, 1990
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