Three-dimensional process and device modeling : S....

Three-dimensional process and device modeling : S. Selberherr and E. Langer. Microelectron. J. 20(1–2), 113 (1989)

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Volume:
30
Year:
1990
Language:
english
DOI:
10.1016/0026-2714(90)90512-l
File:
PDF, 109 KB
english, 1990
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