New effects resulting from the co-operation between process...

New effects resulting from the co-operation between process engineering and equipment design in IC fabrication : Ulf Gottschling, Jena Rev. 1, 10 (1989)

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Volume:
30
Year:
1990
Language:
english
DOI:
10.1016/0026-2714(90)90515-o
File:
PDF, 109 KB
english, 1990
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