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Process optimization tweaking tool (POTT) and its application in controlling oxidation thickness : Richard L. Guldi, C. Dean Jenkins, Gregg M. Damminga, Thomas A. Baum and Thomas A. Foster. IEEE Trans. Semiconductor Mfg 2(2), 54 (1989)
Volume:
30
Year:
1990
Language:
english
DOI:
10.1016/0026-2714(90)90520-w
File:
PDF, 128 KB
english, 1990