![](/img/cover-not-exists.png)
A study of the breakdown testing of thermal silicon oxides and the effects of preoxidation surface treatment : D. B. Kao, J. M. Delarios, C. R. Helms and B. E. Deal. 27th a. Proc. IEEE/IRPS Int. Reliab. Phys. Symp., 9 (1989)
Volume:
30
Year:
1990
Language:
english
DOI:
10.1016/0026-2714(90)90524-q
File:
PDF, 128 KB
english, 1990