Effect of argon implantation on antimony implanted silicon : G. S. Virdi, S. K. Chattopadhyaya, N. Nath and W. S. Khokle. Solid-St. Electron. 32(6), 433 (1989)
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Volume:
30
Year:
1990
Language:
english
DOI:
10.1016/0026-2714(90)90538-x
File:
PDF, 104 KB
Your tags:
english, 1990
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