New applications of focused ion beam technique to failure...

New applications of focused ion beam technique to failure analysis and process monitoring of VLSI : K. Nikawa, K. Nasu, M. Murase, T. Kaito, T. Adachi and S. Inoue. 27th a. Proc. IEEE/IRPS Int. Reliab. Phys. Symp., 43 (1989)

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Volume:
30
Year:
1990
Language:
english
DOI:
10.1016/0026-2714(90)90539-y
File:
PDF, 104 KB
english, 1990
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