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A new reliability problem associated with Ar ion sputter cleaning of interconnect vias : Hideki Tomioka, Shin-Ichi Tanabe and Koichiro Mizukami. 27th a. Proc. IEEE/IRPS Int. Reliab. Phys. Symp., 53 (1989)
Volume:
30
Year:
1990
Language:
english
DOI:
10.1016/0026-2714(90)90540-4
File:
PDF, 104 KB
english, 1990