High growth rate deposition of phosphorus-doped...

Thin Solid Films 2014 / 04 Vol. 557

High growth rate deposition of phosphorus-doped homoepitaxial (001) diamond films for deep-ultraviolet light emitting device

Maida, Osamu, Tada, Shuhei, Ito, Toshimichi
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Volume:
557
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.08.114
Date:
April, 2014
File:
PDF, 521 KB
english, 2014
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