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Infrared ellipsometry for improved laterally resolved analysis of thin films
Hinrichs, Karsten, Furchner, Andreas, Sun, Guoguang, Gensch, Michael, Rappich, Jörg, Oates, Thomas W.H.Volume:
571
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.02.006
Date:
November, 2014
File:
PDF, 959 KB
english, 2014