Atomic-layer-deposited SiO2/TiO2/SiO2 sandwiched...

Atomic-layer-deposited SiO2/TiO2/SiO2 sandwiched dielectrics for metal–insulator–metal capacitor application

Zhang, Qiu-Xiang, Zhu, Bao, Zhang, Li-Feng, Ding, Shi-Jin
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
122
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.03.013
Date:
June, 2014
File:
PDF, 909 KB
english, 2014
Conversion to is in progress
Conversion to is failed