Volume 122

Microelectronic Engineering

Volume 122

1

Atomic-layer-deposited SiO2/TiO2/SiO2 sandwiched dielectrics for metal–insulator–metal capacitor application

Zhang, Qiu-Xiang, Zhu, Bao, Zhang, Li-Feng, Ding, Shi-Jin

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 909 KB

english, 2014

2

The electron scattering at grain boundaries in tungsten films

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 471 KB

english, 2014

3

X-ray source downscaling enabled by combining microfabricated electrodes with carbon nanotube cold electron emitters

Kottler, Christian, Longtin, Rémi, Giudice, Sandra, Jose-James, Rony, Niedermann, Philippe, Neels, Antonia, Kaufmann, Rolf, Sanchez-Valencia, Juan Ramon, Elsener, Hans Rudolf, Gröning, Oliver, Leinenb

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.54 MB

english, 2014

4

In-line through silicon vias etching depths inspection by spectroscopic reflectometry

Fursenko, O., Bauer, J., Marschmeyer, S.

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 963 KB

english, 2014

5

A metal-embedded photo-mask for contact photolithography with application on patterned sapphire substrate

Yan, Jhih-Nan, Chang, Cho-Wei, Lee, Yung-Chun

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.67 MB

english, 2014

6

Scanning Spreading Resistance Microscopy analysis of locally blocked implant sites

Doering, Stefan, Wachowiak, Andre, Winkler, Uwe, Richter, Matthias, Goehler, Jens, Roetz, Hagen, Eckl, Stefan, Mikolajick, Thomas

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.43 MB

english, 2014

7

Characterization of non-amine-based post-copper chemical mechanical planarization cleaning solution

Manivannan, Ramachandran, Cho, Byoung-Jun, Hailin, Xiong, Ramanathan, Srinivasan, Park, Jin-Goo

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.43 MB

english, 2014

8

Organic solvent-free water-developable sugar resist material derived from biomass in green lithography

Takei, Satoshi, Oshima, Akihiro, Ichikawa, Takumi, Sekiguchi, Atsushi, Kashiwakura, Miki, Kozawa, Takahiro, Tagawa, Seiichi, Oyama, Tomoko G., Ito, Syoji, Miyasaka, Hiroshi

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.42 MB

english, 2014

9

Improved LDMOS performance with buried multi-finger gates

Xu, Dawei, Cheng, Xinhong, Yu, Yuehui, Wang, Zhongjian, Cao, Duo, Xia, Chao, Liu, Linjie, Trellenkamp, Stefan, Mantl, Siegfried, Zhao, Qing-Tai

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.39 MB

english, 2014

10

Inside Front Cover - Editorial Board

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 29 KB

english, 2014

11

Study on applying a flexibility-assisted array air bag imprinting processing technology in the development of linear gradient imprinting and simulating an asymmetric imprinting plane

Weng, Yung-Jin, Weng, Yung-Chun

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 2.23 MB

english, 2014

12

Study of microstructure evolution in novel Sn–Zn/Cu bi-layer and Cu/Sn–Zn/Cu sandwich structures with nanoscale thickness for 3D packaging interconnection

Li, Qingqian, Chan, Y.C., Zhang, Kaili, Yung, K.C.

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 2.40 MB

english, 2014

13

Crystallite size estimation and photosensitivity characterization of nanocrystalline Zn1−xCdxS (0⩽x⩽0.9) based heterojunctions prepared by simple dip-coating

Abdel Rafea, M., Farag, A.A.M., El-Shazly, O., El-Wahidy, E.F., Roushdy, N.

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.27 MB

english, 2014

14

Microfabrication of surface acoustic wave device using UV LED photolithography technique

Bing, Chu Yih, Mohanan, Ajay Achath, Saha, Tridib, Nagasundara Ramanan, Ramakrishnan, Parthiban, R., Ramakrishnan, N.

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 968 KB

english, 2014