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Texture characterization of the NiSi film on Si substrate
Kimura, Hiroshi, Tomita, RyujiVolume:
106
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.01.008
Date:
June, 2013
File:
PDF, 1.25 MB
english, 2013