Legitimate domain of a Newtonian behavior for thermal nanoimprint lithography
Teyssèdre, H., Gilormini, P., Landis, S., Régnier, G.Volume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.03.169
Date:
October, 2013
File:
PDF, 340 KB
english, 2013