Fabrication of bulk and epitaxial germanium field emitter arrays by dry etching techniques
Carta, S., Bagni, R., Giovine, E., Foglietti, V., Evangelisti, F., Notargiacomo, A.Volume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.11.024
Date:
October, 2013
File:
PDF, 1.53 MB
english, 2013