Fabrication of MEMS actuators from the BEOL of a 0.25μm...

Microelectronic Engineering 2012 / 9 Vol. 97

Fabrication of MEMS actuators from the BEOL of a 0.25μm BiCMOS technology platform

Kulse, P., Birkholz, M., Ehwald, K.-E., Bauer, J., Drews, J., Haak, U., Höppner, W., Katzer, J., Schulz, K., Wolansky, D.
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Volume:
97
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.04.017
Date:
September, 2012
File:
PDF, 567 KB
english, 2012
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