Electrical characterization of gadolinium oxide deposited by high pressure sputtering with in situ plasma oxidation
Pampillón, María Ángela, Feijoo, Pedro Carlos, San Andrés, EnriqueVolume:
109
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.03.094
Date:
September, 2013
File:
PDF, 1.25 MB
english, 2013