High-κ dielectric breakdown in nanoscale logic devices –...

Microelectronics Reliability 2014 / 05 Vol. 54; Iss. 5

High-κ dielectric breakdown in nanoscale logic devices – Scientific insight and technology impact

Raghavan, Nagarajan, Pey, Kin Leong, Shubhakar, Kalya
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Volume:
54
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2014.02.013
Date:
May, 2014
File:
PDF, 5.27 MB
english, 2014
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