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Micro-heaters embedded in PDMS fabricated using dry peel-off process
Byun, Ikjoo, Ueno, Ryohei, Kim, BeomjoonVolume:
121
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.02.029
Date:
June, 2014
File:
PDF, 1.02 MB
english, 2014