Volume 121

Microelectronic Engineering

Volume 121

1

Fabrication of 120° silicon double mirrors robust against misalignment for use in micro optical gyroscopes

Niesel, Thalke, Dietzel, Andreas

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.59 MB

english, 2014

2

Piezoelectric ultrasonic transducer based on flexible AlN

Mastronardi, Vincenzo Mariano, Guido, Francesco, Amato, Massimiliano, De Vittorio, Massimo, Petroni, Simona

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.16 MB

english, 2014

3

Fabrication of graphene and graphite thin films from organic coating

Kato, Mikihiro, Uki, Kenichi, Harako, Susumu, Zhao, Xinwei

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.64 MB

english, 2014

4

Fabricating embedded SU-8 microstructures with asymmetric inside cross section by double-side multiple partial exposure method

Huang, Yuan-Te, Hsu, Wensyang

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.18 MB

english, 2014

5

Study on fabrication tolerances of SOI based directional couplers and ring resonators

Prinzen, Andreas, Bolten, Jens, Waldow, Michael, Kurz, Heinrich

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 492 KB

english, 2014

6

Single-spot e-beam lithography for defining large arrays of nano-holes

Højlund-Nielsen, Emil, Greibe, Tine, Mortensen, N. Asger, Kristensen, Anders

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 715 KB

english, 2014

7

Modeling the in-situ conductance optimization process in focused electron-beam-induced deposition

Winhold, M., Weirich, P.M., Schwalb, C.H., Huth, M.

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 423 KB

english, 2014

8

Monolithic integration of DUV-induced waveguides into plastic microfluidic chip for optical manipulation

Khoury, M., Vannahme, C., Sørensen, K.T., Kristensen, A., Berg-Sørensen, K.

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.10 MB

english, 2014

9

The coupling of angular momentum of light in metal triangles nano-ring

Huang, Li, Hu, Dejiao, Zhang, Zhiyou, Gao, Fuhua, Du, Jinglei

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 872 KB

english, 2014

10

Formation of reliable electrical and thermal contacts between graphene and metal electrodes by laser annealing

Moshkalev, S.A., Ermakov, V.A., Vaz, A.R., Alaferdov, A.V., Savu, R., Silveira, J.V., Souza Filho, A.G.

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 819 KB

english, 2014

11

Micro-heaters embedded in PDMS fabricated using dry peel-off process

Byun, Ikjoo, Ueno, Ryohei, Kim, Beomjoon

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.02 MB

english, 2014

12

Fabrication of nanoparticles with 3D shape control for X-ray scattering experiments

Guzenko, Vitaliy A., Pedrini, Bill, Menzel, Andreas, David, Christian

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 757 KB

english, 2014

13

Estimation of pattern resolution using NaCl high-contrast developer by Monte Carlo simulation of electron beam lithography

Zhang, Hui, Huda, Miftakhul, Komori, Takuya, Zhang, Yulong, Yin, You, Hosaka, Sumio

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.24 MB

english, 2014

14

Poly(N-acetylaniline) functionalized graphene nanosheets supported Pt electrocatalysts for methanol oxidation

Duan, Jialin, Liu, Xiaowei, Chen, Hailong, Zhang, Yufeng, Du, Juan, Zhang, Xuelin

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.10 MB

english, 2014

15

Biomimetic, antireflective, superhydrophobic and oleophobic PMMA and PMMA-coated glass surfaces fabricated by plasma processing

Kontziampasis, D., Boulousis, G., Smyrnakis, A., Ellinas, K., Tserepi, A., Gogolides, E.

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.41 MB

english, 2014

16

In situ observation of Pt deposition process by using spectroscopic ellipsometry

Goto, Toshiaki, Watanabe, Mitsuhiro, Jin, Lianhua, Kondoh, Eiichi

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.58 MB

english, 2014

17

ZnO nanowires strips growth: Template reliability and morphology study

Pea, M., Maiolo, L., Pilloton, R., Rinaldi, A., Araneo, R., Giovine, E., Orsini, A., Notargiacomo, A.

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.82 MB

english, 2014

18

Self-assembly of ordered silica nanostructures by electrospray

Coll, Arnau, Bermejo, Sandra, Castañer, Luis

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.85 MB

english, 2014

19

Fabrication of three-dimensional PDMS microstructures by selective bonding and cohesive mechanical failure

Byun, Ikjoo, Kim, Beomjoon

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.45 MB

english, 2014

20

Ultra-flexible microelectrode array nanostructured by FIB: A possible route to lower the device impedance

Maiolo, L., Notargiacomo, A., Marrani, M., Minotti, A., Maita, F., Pecora, A.

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.70 MB

english, 2014

21

FIB patterning of dielectric, metallized and graphene membranes: A comparative study

Hemamouche, A., Morin, A., Bourhis, E., Toury, B., Tarnaud, E., Mathé, J., Guégan, P., Madouri, A., Lafosse, X., Ulysse, C., Guilet, S., Patriarche, G., Auvray, L., Montel, F., Wilmart, Q., Plaçais, B

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.56 MB

english, 2014

22

Injection moulding antireflective nanostructures

Christiansen, Alexander B., Clausen, Jeppe S., Mortensen, N. Asger, Kristensen, Anders

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.24 MB

english, 2014

23

Suitable photo-resists for two-photon polymerization using femtosecond fiber lasers

Rajamanickam, V.P., Ferrara, L., Toma, A., Proietti Zaccaria, R., Das, G., Di Fabrizio, E., Liberale, C.

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 844 KB

english, 2014

24

Controlled arrangement of nanoparticles capped with protecting ligand on Au nanopatterns

Yamamoto, Hiroki, Ohnuma, Akira, Ohtani, Bunsho, Kozawa, Takahiro

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 2.07 MB

english, 2014

25

A simple silicon compatible 40nm electroplated copper T-gate process

Cao, Menglin, Li, Xu, Ferguson, Susan, Thoms, Stephen, MacIntyre, Douglas, Thayne, Iain

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.67 MB

english, 2014

26

The effects of dwell time on focused ion beam machining of silicon

Sabouri, A., Anthony, C.J., Bowen, J., Vishnyakov, V., Prewett, P.D.

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 555 KB

english, 2014

27

Oxidation smoothening of silicon machined micro- and nano-scale structures

Azimi, S., Dang, Z.Y., Breese, M.B.H.

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 2.07 MB

english, 2014

28

Mechanical properties of Cu electroplated in supercritical CO2 emulsion evaluated by micro-compression test

Kinashi, Hikaru, Nagoshi, Takashi, Chang, Tso-Fu Mark, Sato, Tatsuo, Sone, Masato

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 896 KB

english, 2014

29

Electron Beam Induced Deposition on graphene on silicon oxide and hexagonal boron nitride: A comparison of substrates

Hari, S., Goossens, A.M., Vandersypen, L.M.K., Hagen, C.W.

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.01 MB

english, 2014

30

Controlled assembly of gold nanorods on nanopatterned surfaces: Effects of surface materials, pH and surfactant

Erola, Markus O.A., Partanen, Anni, Okoro, Sunday C., Rahman, Shakil Md., Lajunen, Hanna, Suvanto, Sari, Suvanto, Mika, Kuittinen, Markku, Pakkanen, Tuula T.

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 757 KB

english, 2014

31

Diamond nanoprobes for electrical probing of nanoelectronics device structures

Hantschel, T., Clarysse, T., Ajaykumar, A., Seidel, F., Tsigkourakos, M., Nuytten, T., Paredis, K., Eyben, P., Majeed, B., Tezcan, D.S., Vandervorst, W.

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.76 MB

english, 2014

32

OFETs with sub-100nm channel length fabricated by wafer-scale NIL and comprehensive DC and AC characterizations

Teng, Lichao, Finn, Andreas, Plötner, Matthias, Shi, Hui, Fischer, Wolf-Joachim

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.15 MB

english, 2014

33

Phononic engineering of silicon using “dots on the fly” e-beam lithography and plasma etching

Lacatena, V., Haras, M., Robillard, J.-F., Monfray, S., Skotnicki, T., Dubois, E.

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 710 KB

english, 2014

34

Fabrication of TiO2 micro-structures by cathodic deposition

Chang, Tso-Fu Mark, Sato, Tatsuo, Sone, Masato

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.21 MB

english, 2014

35

Microcantilever suspension using hard masks and a two phase RIE method

Senveli, Sukru U., Tigli, Onur

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.26 MB

english, 2014

36

Electrostatic pick-and-place micro/nanomanipulation under the electron beam

Denisyuk, Andrey I., Komissarenko, Filipp E., Mukhin, Ivan S.

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 929 KB

english, 2014

37

Controlled poly(pyrrole) patterning by microcontact printing on glass and poly(ethylene terephthalate) substrates

Garcia-Cruz, Alvaro, Zine, Nadia, Sigaud, Monique, Lee, Michael, Marote, Pedro, Lanteri, Pierre, Bausells, Joan, Errachid, Abdelhamid

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.78 MB

english, 2014

38

Preface

Fobelets, Kristel, Utke, Ivo

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 169 KB

english, 2014

39

Table of Contents

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 133 KB

english, 2014

40

Author Index

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 155 KB

english, 2014

41

Inside Front Cover - Editorial Board

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 29 KB

english, 2014

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