Proximity gettering of slow diffuser contaminants in CMOS...

Proximity gettering of slow diffuser contaminants in CMOS image sensors

Russo, F., Moccia, G., Nardone, G., Alfonsetti, R., Polsinelli, G., D’Angelo, A., Patacchiola, A., Liverani, M., Pianezza, P., Lippa, T., Carlini, M., Polignano, M.L., Mica, I., Cazzini, E., Ceresoli,
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Volume:
91
Language:
english
Journal:
Solid-State Electronics
DOI:
10.1016/j.sse.2013.10.011
Date:
January, 2014
File:
PDF, 2.35 MB
english, 2014
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