In situ observation of Pt deposition process by using...

In situ observation of Pt deposition process by using spectroscopic ellipsometry

Goto, Toshiaki, Watanabe, Mitsuhiro, Jin, Lianhua, Kondoh, Eiichi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
121
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.03.001
Date:
June, 2014
File:
PDF, 1.58 MB
english, 2014
Conversion to is in progress
Conversion to is failed