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In situ observation of Pt deposition process by using spectroscopic ellipsometry
Goto, Toshiaki, Watanabe, Mitsuhiro, Jin, Lianhua, Kondoh, EiichiVolume:
121
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.03.001
Date:
June, 2014
File:
PDF, 1.58 MB
english, 2014