Effect of annealing on the electrical properties of insulating aluminum nitride in MIM and MIS structures
Ortiz, Carlos R., Pantojas, Victor M., Otaño-Rivera, WilfredoVolume:
91
Language:
english
Journal:
Solid-State Electronics
DOI:
10.1016/j.sse.2013.10.013
Date:
January, 2014
File:
PDF, 919 KB
english, 2014