Failure analysis and detection methodology for capacitive...

Microelectronics Reliability 2013 / 9 Vol. 53; Iss. 9-11

Failure analysis and detection methodology for capacitive RF-MEMS switches based on BEOL BiCMOS process

Torres Matabosch, N., Coccetti, F., Kaynak, M., Espana, B., Tillack, B., Cazaux, J.L.
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Volume:
53
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2013.07.099
Date:
September, 2013
File:
PDF, 875 KB
english, 2013
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