Impacts of AlGeO formation by post thermal oxidation of Al2O3/Ge structure on interfacial properties
Shibayama, Shigehisa, Kato, Kimihiko, Sakashita, Mitsuo, Takeuchi, Wakana, Taoka, Noriyuki, Nakatsuka, Osamu, Zaima, ShigeakiVolume:
557
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.10.084
Date:
April, 2014
File:
PDF, 1.18 MB
english, 2014