The effects of dwell time on focused ion beam machining of...

Microelectronic Engineering 2014 / 06 Vol. 121

The effects of dwell time on focused ion beam machining of silicon

Sabouri, A., Anthony, C.J., Bowen, J., Vishnyakov, V., Prewett, P.D.
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Volume:
121
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.02.025
Date:
June, 2014
File:
PDF, 555 KB
english, 2014
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