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Oxidation smoothening of silicon machined micro- and nano-scale structures
Azimi, S., Dang, Z.Y., Breese, M.B.H.Volume:
121
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.04.033
Date:
June, 2014
File:
PDF, 2.07 MB
english, 2014