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Resolving lateral and vertical structures by ellipsometry using wavelength range scan
Petrik, P., Agocs, E., Volk, J., Lukacs, I., Fodor, B., Kozma, P., Lohner, T., Oh, S., Wakayama, Y., Nagata, T., Fried, M.Volume:
571
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.02.008
Date:
November, 2014
File:
PDF, 631 KB
english, 2014