Polycarbonate electron beam resist using solvent developer

Microelectronic Engineering 2014 / 1 Vol. 113

Polycarbonate electron beam resist using solvent developer

Abbas, Arwa Saud, Yavuz, Mustafa, Cui, Bo
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Volume:
113
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.08.006
Date:
January, 2014
File:
PDF, 668 KB
english, 2014
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