Feature development on prepatterned elastomer surfaces upon...

Microelectronic Engineering 2013 / 10 Vol. 110

Feature development on prepatterned elastomer surfaces upon ion implantation

Sun, Y., Wang, H.Y., Xiong, T., Chu, P.K., Leung, C.W.
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Volume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.02.054
Date:
October, 2013
File:
PDF, 854 KB
english, 2013
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