Actuation voltage signal-shaping for smooth scanning beam locus of a light steering system with a dual-axis analog MEMS pointing mirror
Won, Jong-Seob, Choi, Hae Woon, Park, Jae-Joon, Lee, Seon-BongVolume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.04.018
Date:
October, 2013
File:
PDF, 1.54 MB
english, 2013