Actuation voltage signal-shaping for smooth scanning beam...

Actuation voltage signal-shaping for smooth scanning beam locus of a light steering system with a dual-axis analog MEMS pointing mirror

Won, Jong-Seob, Choi, Hae Woon, Park, Jae-Joon, Lee, Seon-Bong
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Volume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.04.018
Date:
October, 2013
File:
PDF, 1.54 MB
english, 2013
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