High-k gadolinium and aluminum scandates for hybrid...

High-k gadolinium and aluminum scandates for hybrid floating gate NAND flash

Lisoni, Judit G., Breuil, Laurent, Nyns, Laura, Blomme, Pieter, Van den bosch, Geert, Van Houdt, Jan
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Volume:
109
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.03.089
Date:
September, 2013
File:
PDF, 667 KB
english, 2013
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