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Contour deposition—A new epitaxial deposition technique for...

Contour deposition—A new epitaxial deposition technique for semiconductor devices and integrated circuits

T. Klein
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Volume:
9
Year:
1966
Language:
english
Pages:
8
DOI:
10.1016/0038-1101(66)90072-4
File:
PDF, 733 KB
english, 1966
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