Plasma etching dynamics of CaxBa1−xNb2O6 (CBN) material
Vigne, S., Munõz, J., Delprat, S., Margot, J., Chaker, M.Volume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.01.052
Date:
October, 2013
File:
PDF, 1.01 MB
english, 2013