Annealing of SiSiO2 interface states using Ar-ion-implant-damage-gettering
B. Golja, A.G. NassibianVolume:
23
Year:
1980
Language:
english
Pages:
6
DOI:
10.1016/0038-1101(80)90120-3
File:
PDF, 612 KB
english, 1980