Efficient modeling parameter extraction for dual pearson...

Solid-State Electronics 1990 Vol. 33; Iss. 6

Efficient modeling parameter extraction for dual pearson approach to simulation of implanted impurity profiles in silicon

Changhae Park, Kevin M. Klein, Al F. Tasch
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Volume:
33
Year:
1990
Language:
english
Pages:
6
DOI:
10.1016/0038-1101(90)90176-f
File:
PDF, 485 KB
english, 1990
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