AFM characterization of annealed nanoimprinted patterns applied to rheological properties measurement of thin polymer films with shear rate control
Rognin, E., Landis, S., Davoust, L.Volume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.02.002
Date:
October, 2013
File:
PDF, 531 KB
english, 2013