AFM characterization of annealed nanoimprinted patterns...

AFM characterization of annealed nanoimprinted patterns applied to rheological properties measurement of thin polymer films with shear rate control

Rognin, E., Landis, S., Davoust, L.
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Volume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.02.002
Date:
October, 2013
File:
PDF, 531 KB
english, 2013
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