Fabrication of sub 20-nm wide grooves in a quartz mold by space narrowing dry etching
Suzuki, Kenta, Youn, Sung-Won, Wang, Qing, Hiroshima, Hiroshi, Nishioka, YasushiroVolume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.02.106
Date:
October, 2013
File:
PDF, 1.02 MB
english, 2013