Morphology evolution of epitaxial SiGe and Si in patterns
Seiss, Birgit, Dutartre, DidierVolume:
83
Language:
english
Journal:
Solid-State Electronics
DOI:
10.1016/j.sse.2013.01.034
Date:
May, 2013
File:
PDF, 1.24 MB
english, 2013