Out-of-plane bending based on SiN-ion-irradiation and bilayer structures for easy access for micromanipulation
Savenko, Alexey, Yildiz, Izzet, Bøggild, PeterVolume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.02.080
Date:
October, 2013
File:
PDF, 1.92 MB
english, 2013