Direct bonding for the encapsulation of transverse optical...

Direct bonding for the encapsulation of transverse optical gratings

Kalkowski, Gerhard, Benkenstein, Tino, Rothhardt, Carolin, Fuchs, Frank, Zeitner, Uwe
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Volume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.02.031
Date:
October, 2013
File:
PDF, 1.36 MB
english, 2013
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