Direct bonding for the encapsulation of transverse optical gratings
Kalkowski, Gerhard, Benkenstein, Tino, Rothhardt, Carolin, Fuchs, Frank, Zeitner, UweVolume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.02.031
Date:
October, 2013
File:
PDF, 1.36 MB
english, 2013