Fabrication process development for a high sensitive...

Microelectronic Engineering 2012 / 9 Vol. 97

Fabrication process development for a high sensitive electrochemical IDA sensor

Partel, S., Mayer, M., Hudek, P., Dinçer, C., Kieninger, J., Urban, G.A., Motzek, K., Matay, L.
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Volume:
97
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.03.028
Date:
September, 2012
File:
PDF, 985 KB
english, 2012
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