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Preparation and properties of Al2O3 films by d.c. and r.f. magnetron sputtering
C. Deshpandey, L. HollandVolume:
96
Year:
1982
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(82)90251-6
File:
PDF, 325 KB
english, 1982