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Volume 96; Issue 3
Main
Thin Solid Films
Volume 96; Issue 3
Thin Solid Films
Volume 96; Issue 3
1
A study of heterogeneous niobium carbonitride thin films deposited by reactive sputtering
André Aubert
,
Jean Spitz
Journal:
Thin Solid Films
Year:
1982
Language:
english
File:
PDF, 382 KB
Your tags:
english, 1982
2
Vacuum coating of large areas
S. Schiller
,
G. Beister
,
M. Neumann
,
G. Jaesch
Journal:
Thin Solid Films
Year:
1982
Language:
english
File:
PDF, 1.27 MB
Your tags:
english, 1982
3
Design and capabilities of a novel cylindrical-post magnetron sputtering source
D.W. Hoffman
Journal:
Thin Solid Films
Year:
1982
Language:
english
File:
PDF, 601 KB
Your tags:
english, 1982
4
Planar magnetron sputtering cathode with deposition rate distribution controllability
Katsuo Abe
,
Shigeru Kobayashi
,
Tsuneaki Kamel
,
Tamotsu Shimizu
,
Hideki Tateishi
,
Susumu Aiuchi
Journal:
Thin Solid Films
Year:
1982
Language:
english
File:
PDF, 618 KB
Your tags:
english, 1982
5
On the investigation of d.c. plasmatron discharges by optical emission spectrometry
S. Schiller
,
U. Heisig
,
K. Steinfelder
,
J. Strümpfel
,
R. Voigt
,
R. Fendler
,
G. Teschner
Journal:
Thin Solid Films
Year:
1982
Language:
english
File:
PDF, 319 KB
Your tags:
english, 1982
6
Analysis of substrate heat fluxes encountered during aluminum magnetron sputter deposition
R. Hieronymi
,
B. Sirovich
,
W. Class
Journal:
Thin Solid Films
Year:
1982
Language:
english
File:
PDF, 298 KB
Your tags:
english, 1982
7
Surface roughening under ion bombardment
C.S. Bhatia
Journal:
Thin Solid Films
Year:
1982
Language:
english
File:
PDF, 1.37 MB
Your tags:
english, 1982
8
Adhesion, internal stress, microstructure and resistivity of thin alloy films of aluminium, copper and silver
A.G. Dirks
,
J.J. Van Den Broek
Journal:
Thin Solid Films
Year:
1982
Language:
english
File:
PDF, 801 KB
Your tags:
english, 1982
9
Preparation and properties of Al2O3 films by d.c. and r.f. magnetron sputtering
C. Deshpandey
,
L. Holland
Journal:
Thin Solid Films
Year:
1982
Language:
english
File:
PDF, 325 KB
Your tags:
english, 1982
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