Low temperature doping of arsenic atoms in silicon during Pd2Si formation
I. Ohdomari, K. Suguro, M. Akiyama, T. Maeda, K.N. Tu, I. Kimura, K. YonedaVolume:
89
Year:
1982
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(82)90307-8
File:
PDF, 245 KB
english, 1982