Detection of pinholes in R.F.-diode-sputtered SiO2 films
Takeo Hattori, Yutaka Utsugi, Hiroshi YamauchiVolume:
97
Year:
1982
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(82)90457-6
File:
PDF, 232 KB
english, 1982