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Relationship between the physicochemical and electronic properties of sputtered hydrogenated amorphous silicon films: The effect of substrate temperature
D Jousse, J Saïd, J.P StoquertVolume:
124
Year:
1985
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(85)90265-2
File:
PDF, 357 KB
english, 1985