The role of hydrogen in silicon nitride and silicon...

Thin Solid Films 1985 Vol. 124; Iss. 3-4

The role of hydrogen in silicon nitride and silicon oxynitride films

Dirk Schalch, Arthur Scharmann, Robert Wolfrat
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Volume:
124
Year:
1985
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(85)90280-9
File:
PDF, 383 KB
english, 1985
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